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Research

MEMS Sensors

Microelectromechanical (MEMS) sensors use microfabrication and nanofabrication methods to fabricate devices that can transduce information from one energy domain into another.  In our group, we have been developing devices that can transduce mechanical strain into optical signals from a photonic crystal.  Applications for these devices include high resolution strain gauges, systems that can map strain distributions over large areas, optical modulators, and acoustic sensor arrays.

  • Photonic Crystal Strain Gauge

 

 

Nano Sensors Group
Department of Electrical and Computer Engineering
University of Illinois at Urbana-Champaign

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